JPS6214733U - - Google Patents
Info
- Publication number
- JPS6214733U JPS6214733U JP10563985U JP10563985U JPS6214733U JP S6214733 U JPS6214733 U JP S6214733U JP 10563985 U JP10563985 U JP 10563985U JP 10563985 U JP10563985 U JP 10563985U JP S6214733 U JPS6214733 U JP S6214733U
- Authority
- JP
- Japan
- Prior art keywords
- protrusion
- positioning device
- wafer transfer
- locus
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10563985U JPH0110931Y2 (en]) | 1985-07-12 | 1985-07-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10563985U JPH0110931Y2 (en]) | 1985-07-12 | 1985-07-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6214733U true JPS6214733U (en]) | 1987-01-29 |
| JPH0110931Y2 JPH0110931Y2 (en]) | 1989-03-29 |
Family
ID=30980260
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10563985U Expired JPH0110931Y2 (en]) | 1985-07-12 | 1985-07-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0110931Y2 (en]) |
-
1985
- 1985-07-12 JP JP10563985U patent/JPH0110931Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0110931Y2 (en]) | 1989-03-29 |